Bayerische Forschungsallianz

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Generating knowledge –
promoting progress

FOROB II - Fields of work

II. Function layers



In this area the thermal, dielectric or luminescend properties of surface coatings are of special interest. The development being succsessful, integration density in microelectronics can be further increased for capacitors can be constructed in smaller dimensions or because heat fluxes can be diagnosed or bleede off in a better way. The targeted deposition of diamond on tungsten-copper alloys or of barium-strontium-titanate on silicon are completely new.

Projects:

  • Chemical vapour deposition of thin films with high relative permittivity instanced by barium-strontium-titanate
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  • Development of a high barrier composite for flexible packagings
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  • Doped layer systems: optical sensoring of electrical field strength and temperature
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  • Optical videodiscs for high resolution digital X-ray diagnostics
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  • Optimization of CVD reactor and process design by numerical simulation for refinement of layer-thickness homogeneity
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  • Smoothed diamond coatings as heat straddlers and tribo pairings
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