FOROB

BAVARIAN JOINT RESEARCH PROGRAM FOR SURFACE TECHNOLOGY

FOROB

II. Function layers

In this area the thermal, dielectric or luminescend properties of surface coatings are of special interest. The development being succsessful, integration density in microelectronics can be further increased for capacitors can be constructed in smaller dimensions or because heat fluxes can be diagnosed or bleede off in a better way. The targeted deposition of diamond on tungsten-copper alloys or of barium-strontium-titanate on silicon are completely new.

Projects

  • II.5 Doped layer systems: optical sensoring of electrical field strength and temperature
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  • II.6 Development of a high barrier composite for flexible packagings
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  • II.2 Chemical vapour deposition of thin films with high relative permittivity instanced by barium-strontium-titanate
    more
  • II.1 Optical videodiscs for high resolution digital X-ray diagnostics
    more
  • II.3 Optimization of CVD reactor and process design by numerical simulation for refinement of layer-thickness homogeneity
    more
  • II.4 Smoothed diamond coatings as heat straddlers and tribo pairings
    more

Information

Launching date

12.1994

End

11.1998

Funded by

Bavarian Research Foundation