FORMIKROSYS

RESEARCH ASSOCIATION MICROSYSTEM TECHNOLOGY

"Single frame real time interferometer for the deformation measurement of

Field of work:

Phase shifting interferometers used for deformation measurements of surfaces usually take the phase shifted interference patterns one after another. In contrast, the interferometer which will be realised in this project gets all phaseshiftedimages within a single frame of the CCD camera, thus minimizing errors due to thermal effects or vibrations of the object. Another application is the measurement of transient deformations of objects. The key components of the system are a binary phase grating for dividing the image intosix diffraction orders, polarization optics for introducing the phase shift, and fibres for the flexible handling of the system under industrial conditions. This also allows for a compact design of the sensor head.