BAVARIAN JOINT RESEARCH PROGRAM FOR SURFACE TECHNOLOGY
II. Function layers
In this area the thermal, dielectric or luminescend properties of surface coatings are of special interest. The development being succsessful, integration density in microelectronics can be further increased for capacitors can be constructed in smaller dimensions or because heat fluxes can be diagnosed or bleede off in a better way. The targeted deposition of diamond on tungsten-copper alloys or of barium-strontium-titanate on silicon are completely new.